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FreePDK3 <sup>TM</sup> Predictive Process Design Kit | ||
===================================================== | ||
version 1.0 (2021-08-30) | ||
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Copyright (c) 2021 North Carolina State University, | ||
All Rights Reserved. | ||
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Please see the file LICENSE in this directory for license. | ||
You may not use these files except in compliance with the License. | ||
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## Welcome to the FreePDK <sup>TM</sup> 3nm Free, Open-Source Process Design Kit | ||
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This initiative is brought to you by NC State Univeristy and Synopsys. | ||
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This version of the kit was created by the following at NC State University: | ||
* Sushant Sadangi - Design Rules, Layer Stack, and ICV Rules | ||
* Viswanatha Pasumarthy - Star-RC Models | ||
* W. Shepherd Pitts - HSPICE Models | ||
* W. Rhett Davis - Custom Compiler Support and Project Management | ||
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Many thanks to the following at Synopsys for technical and financial support: | ||
* Ron Duncan - Process technology advice and ICV Support | ||
* Luis Francisco & Yen-Sung Chen - ICV Rules Templates and Coding Support | ||
* Olaf Schneider - Custom Compiler PDK and Scripting Support | ||
* Jonathan White & Patrick Haspel - Project Management | ||
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## Quick Design Kit Usage Instructions | ||
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1) Create or modify the file lib.defs in your current directory | ||
and ensure that it includes the following line: | ||
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INCLUDE $PDK_DIR/syncust/lib.defs | ||
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...where $PDK_DIR is replaced with the path to the directory | ||
containing this file. Note that the environmnet variable | ||
PDK_DIR does not need to be set. | ||
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2) Source your setup scripts for Synopsys Custom Compiler, IC Validator, | ||
Star-RC, HSPICE, and Custom WaveView | ||
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3) Start Synopsys Custom Compiler with the command `custom_compiler &` | ||
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## Contents | ||
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| Directory | Contents | | ||
| ---------- | -------------------------------------------------------------- | | ||
| syncust/ | Technology libraries and scripts for Synopsys Custom Compiler | | ||
| icv/ | DRC and LVS rules for Synopsys IC Validator | | ||
| starrc/ | Parasitic extraction models for Synopsys StarRC | | ||
| hspice/ | Simulation models for Synopsys HSPICE | | ||
| examples/ | Example library with layouts and schematics | | ||
| doc/ | Design Rule Manual and Release Notes | | ||
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More documentation and tutorials for this kit | ||
can be found at <http://www.eda.ncsu.edu/FreePDK> | ||
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*Please send all questions and comments to <[email protected]>* | ||
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FreePDK3 Release Notes | ||
====================== | ||
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## Version 1.0 (2021-08-30) | ||
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* Included in this release | ||
* Technology library and display resources for Synopsys Custom Compiler | ||
(Tested with Custom Compiler Q-2020.03-SP2) | ||
* IC Validator DRC & LVS Rules (Tested with ICV R-2020.09) | ||
* StarRC extraction Models (Tested with StarRC R-2020.09) | ||
* HSPICE Simulation Models (Tested with HSPICE Q-2020.03-SP2) | ||
* Issues with this release | ||
* Design Rules | ||
* The ANTENNA rule is implemented, but no protection-diode structure | ||
exists. Therefore, some other means to fix the violation would be | ||
required for long run lengths (such as "stapling" to a lower metal | ||
layer). We plan to release an updated kit with a protection-diode. | ||
Until then, this rule can be disabled by editing the file | ||
icv/FreePDK3_main.drc.rs by inserting comment characters "//" in | ||
front of the line that includes FreePDK3.antenna.drc.rs. | ||
* Preliminary double patterning rules have been added for metal layers | ||
1-3 and 7-9. Rule Mx.7 decomposes each layer into two masks and | ||
stores the result in a file called m#_dpt_output.gds. Rule Mx.8 | ||
checks to ensure that density requirements are met. These rules | ||
are otherwise undocumented, buecause we are still tuning them and | ||
expect them to change in a future release. | ||
* Circuit Simulation Models | ||
* Preliminary HSPICE models have been added, based on a simple | ||
Sentaurus simulation. This model includes a single nanosheet wrapped | ||
in gate metal with no source or drain regions. Our simulations are | ||
showing much better performance than we would have expected, so please | ||
use these models only as a first glimpse of a gate-all-around FET. | ||
More work is needed to properly tune these models. Please contact us | ||
if you would like to help with this task. | ||
* Parasitic Extraction Models | ||
* StarRC extraction models are also are provided for a typical process. | ||
We anticipate supporting corner models in a future release. | ||
* StarRC models are complete down to the V0A layer, but the lower layers | ||
need additional work. In particular, we anticipate one or more of | ||
the following changes in a future release: | ||
* Separate GATE layers in ICV LVS rules for device and field, | ||
with the LAYER_TYPE properly set, to avoid double-counting the GATE capacitance (Rule 2, p. 8-13 in StarRC User Guide) | ||
* a MULTIGATE statement to model the gate all around the nanosheet | ||
(p. 12-4 in StarRC User Guide) | ||
* TRENCH_CONTACT layer-types to properly model the M0A layer | ||
* Proper modeling of the conformal dielectric of the buried power-rail | ||
to capture substrate coupling capacitance |