diff --git a/internal/collector/telemetry/process_telemetry.go b/internal/collector/telemetry/process_telemetry.go
index fe0240640b1..89d763f3ee9 100644
--- a/internal/collector/telemetry/process_telemetry.go
+++ b/internal/collector/telemetry/process_telemetry.go
@@ -20,17 +20,30 @@ import (
 	"runtime"
 	"time"
 
-	"github.com/prometheus/procfs"
+	"github.com/shirou/gopsutil/process"
 	"go.opencensus.io/stats"
 	"go.opencensus.io/stats/view"
 )
 
 // ProcessMetricsViews is a struct that contains views related to process metrics (cpu, mem, etc)
 type ProcessMetricsViews struct {
-	ballastSizeBytes uint64
-	views            []*view.View
-	done             chan struct{}
-	proc             *procfs.Proc
+	startTimeUnixNano int64
+	ballastSizeBytes  uint64
+	views             []*view.View
+	done              chan struct{}
+	proc              *process.Process
+}
+
+var mUptime = stats.Int64(
+	"process/uptime",
+	"Uptime of the process",
+	stats.UnitSeconds)
+var viewProcessUptime = &view.View{
+	Name:        mUptime.Name(),
+	Description: mUptime.Description(),
+	Measure:     mUptime,
+	Aggregation: view.LastValue(),
+	TagKeys:     nil,
 }
 
 var mRuntimeAllocMem = stats.Int64(
@@ -81,23 +94,37 @@ var viewCPUSeconds = &view.View{
 	TagKeys:     nil,
 }
 
+var mRSSMemory = stats.Int64(
+	"process/memory/rss",
+	"Total physical memory (resident set size)",
+	stats.UnitDimensionless)
+var viewRSSMemory = &view.View{
+	Name:        mRSSMemory.Name(),
+	Description: mRSSMemory.Description(),
+	Measure:     mRSSMemory,
+	Aggregation: view.LastValue(),
+	TagKeys:     nil,
+}
+
 // NewProcessMetricsViews creates a new set of ProcessMetrics (mem, cpu) that can be used to measure
 // basic information about this process.
-func NewProcessMetricsViews(ballastSizeBytes uint64) *ProcessMetricsViews {
+func NewProcessMetricsViews(ballastSizeBytes uint64) (*ProcessMetricsViews, error) {
 	pmv := &ProcessMetricsViews{
-		ballastSizeBytes: ballastSizeBytes,
-		views:            []*view.View{viewAllocMem, viewTotalAllocMem, viewSysMem, viewCPUSeconds},
-		done:             make(chan struct{}),
+		startTimeUnixNano: time.Now().UnixNano(),
+		ballastSizeBytes:  ballastSizeBytes,
+		views:             []*view.View{viewProcessUptime, viewAllocMem, viewTotalAllocMem, viewSysMem, viewCPUSeconds, viewRSSMemory},
+		done:              make(chan struct{}),
 	}
 
-	// procfs.Proc is not available on windows and expected to fail.
 	pid := os.Getpid()
-	proc, err := procfs.NewProc(pid)
-	if err == nil {
-		pmv.proc = &proc
+
+	var err error
+	pmv.proc, err = process.NewProcess(int32(pid))
+	if err != nil {
+		return nil, err
 	}
 
-	return pmv
+	return pmv, nil
 }
 
 // StartCollection starts a ticker'd goroutine that will update the PMV measurements every 5 seconds
@@ -128,14 +155,18 @@ func (pmv *ProcessMetricsViews) StopCollection() {
 
 func (pmv *ProcessMetricsViews) updateViews() {
 	ms := &runtime.MemStats{}
+	stats.Record(context.Background(), mUptime.M(time.Now().UnixNano()-pmv.startTimeUnixNano))
 	pmv.readMemStats(ms)
 	stats.Record(context.Background(), mRuntimeAllocMem.M(int64(ms.Alloc)))
 	stats.Record(context.Background(), mRuntimeTotalAllocMem.M(int64(ms.TotalAlloc)))
 	stats.Record(context.Background(), mRuntimeSysMem.M(int64(ms.Sys)))
 
 	if pmv.proc != nil {
-		if procStat, err := pmv.proc.Stat(); err == nil {
-			stats.Record(context.Background(), mCPUSeconds.M(int64(procStat.CPUTime())))
+		if times, err := pmv.proc.Times(); err == nil {
+			stats.Record(context.Background(), mCPUSeconds.M(int64(times.Total())))
+		}
+		if mem, err := pmv.proc.MemoryInfo(); err == nil {
+			stats.Record(context.Background(), mRSSMemory.M(int64(mem.RSS)))
 		}
 	}
 }
diff --git a/internal/collector/telemetry/process_telemetry_test.go b/internal/collector/telemetry/process_telemetry_test.go
index 97b15b91640..1bc1bf45588 100644
--- a/internal/collector/telemetry/process_telemetry_test.go
+++ b/internal/collector/telemetry/process_telemetry_test.go
@@ -27,17 +27,20 @@ import (
 func TestProcessTelemetry(t *testing.T) {
 	const ballastSizeBytes uint64 = 0
 
-	pmv := NewProcessMetricsViews(ballastSizeBytes)
+	pmv, err := NewProcessMetricsViews(ballastSizeBytes)
+	require.NoError(t, err)
 	assert.NotNil(t, pmv)
 
 	expectedViews := []string{
 		// Changing a metric name is a breaking change.
 		// Adding new metrics is ok as long it follows the conventions described at
 		// https://pkg.go.dev/go.opentelemetry.io/collector/obsreport?tab=doc#hdr-Naming_Convention_for_New_Metrics
+		"process/uptime",
 		"process/runtime/heap_alloc_bytes",
 		"process/runtime/total_alloc_bytes",
 		"process/runtime/total_sys_memory_bytes",
 		"process/cpu_seconds",
+		"process/memory/rss",
 	}
 	processViews := pmv.Views()
 	assert.Len(t, processViews, len(expectedViews))
diff --git a/service/telemetry.go b/service/telemetry.go
index 6678102744b..c6df9923cc6 100644
--- a/service/telemetry.go
+++ b/service/telemetry.go
@@ -60,13 +60,17 @@ func (tel *appTelemetry) init(asyncErrorChannel chan<- error, ballastSizeBytes u
 		return nil
 	}
 
+	processMetricsViews, err := telemetry.NewProcessMetricsViews(ballastSizeBytes)
+	if err != nil {
+		return err
+	}
+
 	var views []*view.View
 	views = append(views, obsreport.Configure(telemetry.UseLegacyMetrics(), telemetry.UseNewMetrics())...)
 	views = append(views, processor.MetricViews(level)...)
 	views = append(views, queuedprocessor.MetricViews(level)...)
 	views = append(views, batchprocessor.MetricViews(level)...)
 	views = append(views, tailsamplingprocessor.SamplingProcessorMetricViews(level)...)
-	processMetricsViews := telemetry.NewProcessMetricsViews(ballastSizeBytes)
 	views = append(views, processMetricsViews.Views()...)
 	views = append(views, fluentobserv.Views(level)...)
 	tel.views = views